Stacked ALD Deposited Metal Oxide Films as Reliable Sensing Films for Organic Semiconductor- Based LAPS

Chia-Ming Yang; B. Jiang; C. Chen; Y. Yang

Stacked ALD Deposited Metal Oxide Films as Reliable Sensing Films for Organic Semiconductor- Based LAPS

Chia-Ming Yang, B. Jiang, C. Chen, Y. Yang

Department of Biomedical Engineering

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2024
Event	The AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) featuring the 11th International Atomic Layer Etching Workshop (ALE 2024) - Helsinki, Finland Duration: 04 08 2024 → 07 08 2024

Conference

Conference	The AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) featuring the 11th International Atomic Layer Etching Workshop (ALE 2024)
Period	04/08/24 → 07/08/24

Cite this

@conference{20661cc4324a4b3885af63219e572be9,

title = "Stacked ALD Deposited Metal Oxide Films as Reliable Sensing Films for Organic Semiconductor- Based LAPS",

author = "Chia-Ming Yang and B. Jiang and C. Chen and Y. Yang",

year = "2024",

language = "American English",

note = "The AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) featuring the 11th International Atomic Layer Etching Workshop (ALE 2024) ; Conference date: 04-08-2024 Through 07-08-2024",

}

TY - CONF

T1 - Stacked ALD Deposited Metal Oxide Films as Reliable Sensing Films for Organic Semiconductor- Based LAPS

AU - Yang, Chia-Ming

AU - Jiang, B.

AU - Chen, C.

AU - Yang, Y.

PY - 2024

Y1 - 2024

M3 - Proceeding

T2 - The AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) featuring the 11th International Atomic Layer Etching Workshop (ALE 2024)

Y2 - 4 August 2024 through 7 August 2024

ER -