@inbook{98b97f1af8434a3086f8804c99eb63ee,
title = "Structural and Electrical Characteristics of Alternative High-k Dielectrics for CMOS Applications",
keywords = "Atomic force microscopy, High permittivity dielectric (high-k), Rare-earth oxide, Transmission electron microscope, X-ray diffraction, X-ray photoelectron spectroscopy",
author = "Chiu, {Fu Chien} and Somnath Mondal and Pan, {Tung Ming}",
year = "2012",
month = aug,
day = "23",
doi = "10.1002/9783527646340.ch5",
language = "英语",
isbn = "9783527330324",
pages = "111--184",
booktitle = "High-k Gate Dielectrics for CMOS Technology",
publisher = "Wiley-VCH",
}