Structural and Sensing Properties of Sol-Gel Synthesized Ce2(Zr1-xTix)Oy Sensing Films for pH Sensors

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Abstract

In this brief, the structural properties and sensing characteristics of spin-coated Ce2(Zr1-xTix)Oy (CZT) sensing film were investigated for electrolyte-insulator-semiconductor (EIS) pH sensors. A higher pH sensitivity of 64.42 mV/pH, a lower hysteresis voltage of 1.1 mV, and a smaller drift rate of 0.36 mV/h were achieved in the CZT-embedded EIS sensors at Zr/Ti = 53/47 stoichiometry. The higher sensing behavior in CZT is attributed to the good crystallization and higher surface roughness of the film.

Original languageEnglish
Article number8002613
Pages (from-to)3971-3975
Number of pages5
JournalIEEE Transactions on Electron Devices
Volume64
Issue number9
DOIs
StatePublished - 09 2017

Bibliographical note

Publisher Copyright:
© 1963-2012 IEEE.

Keywords

  • Ce(Zr1-xTix)Oy (CZT)
  • electrolyte-insulator-semiconductor (EIS)
  • pH sensor
  • sol-gel method

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