Abstract
In this brief, the structural properties and sensing characteristics of spin-coated Ce2(Zr1-xTix)Oy (CZT) sensing film were investigated for electrolyte-insulator-semiconductor (EIS) pH sensors. A higher pH sensitivity of 64.42 mV/pH, a lower hysteresis voltage of 1.1 mV, and a smaller drift rate of 0.36 mV/h were achieved in the CZT-embedded EIS sensors at Zr/Ti = 53/47 stoichiometry. The higher sensing behavior in CZT is attributed to the good crystallization and higher surface roughness of the film.
| Original language | English |
|---|---|
| Article number | 8002613 |
| Pages (from-to) | 3971-3975 |
| Number of pages | 5 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 64 |
| Issue number | 9 |
| DOIs | |
| State | Published - 09 2017 |
Bibliographical note
Publisher Copyright:© 1963-2012 IEEE.
Keywords
- Ce(Zr1-xTix)Oy (CZT)
- electrolyte-insulator-semiconductor (EIS)
- pH sensor
- sol-gel method