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Structure analysis, mechanical property, and biocompatibility of TaOxNy thin films
J. H. Hsieh*, Y. H. Lai, Y. C. Lin, S. J. Liao, C. Li, Y. H. Chang, C. C. Hu
*Corresponding author for this work
Research output: Contribution to journal › Journal Article › peer-review
6
Scopus
citations