Structure analysis, mechanical property, and biocompatibility of TaOxNy thin films

  • J. H. Hsieh*
  • , Y. H. Lai
  • , Y. C. Lin
  • , S. J. Liao
  • , C. Li
  • , Y. H. Chang
  • , C. C. Hu
    • *Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

7 Scopus citations

Fingerprint

Dive into the research topics of 'Structure analysis, mechanical property, and biocompatibility of TaOxNy thin films'. Together they form a unique fingerprint.

Physics

Chemistry

Material Science

Engineering