Study of fabrication and characterization of high power 850 nm vertical-cavity surface-emitting laser arrays

G. M. Wu*, F. C. Kung, C. Y. Lee

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

5 Scopus citations

Abstract

In this paper, we investigated high power selectively oxidation-confined AlxGa1 xAs/GaAs 850 nm vertical-cavity surface-emitting laser (VCSEL) and fabricated two-dimensional VCSEL arrays by photolithography using photo masks. Inductively coupled plasma (ICP) was employed to create the deep platform during the mesa process. The number of illuminating lasers has been designed at 60, 85, and 109 in the array. We further studied the influence of the number of illuminating lasers on the characteristics of the VCSEL devices. The threshold current was found to be increased significantly at about 93 mA, 118 mA, and 149 mA, respectively. The injection current should produce a greater than the critical current density to meet the criteria for population inversion. However, the corresponding voltage remained almost unchanged, in the range of 1.57–1.63 V. The maximum optical output power was increased even more appreciably. It was measured at 448 mW, 592 mW, and 746 mW, respectively. On the other hand, the device equivalent series resistance was decreased with more illumination lasers in the array. The averaged resistance has been estimated at 4.16 Ω, 3.14 Ω, and 2.47 Ω, respectively. In addition, the optical spectrum became more dispersed, showing more lasing modes for the samples with the highest number in illumination lasers in the array. The peak wavelength full width at half-maximum was also slightly increased. The related electro-optical characteristics have been summarized and further discussed.

Original languageEnglish
Article number125489
JournalSurface and Coatings Technology
Volume387
DOIs
StatePublished - 15 04 2020

Bibliographical note

Publisher Copyright:
© 2020 Elsevier B.V.

Keywords

  • High power
  • Inductively coupled plasma
  • Laser array
  • Surface emitting

Fingerprint

Dive into the research topics of 'Study of fabrication and characterization of high power 850 nm vertical-cavity surface-emitting laser arrays'. Together they form a unique fingerprint.

Cite this