Study of oxidation and wear behaviors of (Nb,Cr)N thin films using Raman spectroscopy

J. H. Hsieh*, C. Li, A. L.K. Tan, C. K. Poh, N. J. Tan

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

19 Scopus citations

Abstract

Several (Nb,Cr)N coatings were deposited by an unbalanced magnetron sputtering system. Following the deposition, the tribological properties of these coatings were studied using a ball-on-disk setup with alumina balls. The wear debris was then characterized using Raman spectroscopy to identify oxides generated during the wear process to gain a better understanding of tribochemical reactions. The results show that Cr2O3 and CrNbO4 constitute the debris obtained from Cr-rich coatings, while Nb2O5· n H2O is the major constituent of the debris formed on Nb-rich coatings. From the study of the debris, the difference in wear mechanism between Cr-rich and Nb-rich coatings is explained and confirmed.

Original languageEnglish
Pages (from-to)299-305
Number of pages7
JournalSurface and Coatings Technology
Volume177-178
DOIs
StatePublished - 30 01 2004
Externally publishedYes

Keywords

  • (Nb,Cr)N coatings
  • Oxidation
  • Raman spectroscopy
  • Wear debris

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