Study of Phosphorus Deactivation in Silicon

林志鴻

Research output: Types of ThesisDoctoral thesis

Translated title of the contribution磷摻雜於矽中去活化行為之探討
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2013
Externally publishedYes

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