Study of TiO2 and Nd2O3 High-k Materials Deposited on Polycrystalline Silicon

  • 詹圳正

Research output: Types of Thesis › Master's thesis

Translated title of the contribution使用二氧化鈦與三氧化二釹之高介電材料沉積在複晶矽薄膜上之研究
Original languageAmerican English
Supervisors/Advisors
  • Kao, Chyuan-Haur, Supervisor
StatePublished - 2009
Externally publishedYes

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