Superior improvements in GIDL and retention by fluorine implantation in saddle-fin array devices for sub-40-nm DRAM technology

Chia Ming Yang, Jer Chyi Wang, Wei Ping Lee, Chien Chi Lee, Chih Hung Lin, Chung Yuan Lee, Jo Hui Lin, Hsin Huei Chen, Chih Yuan Hsiao, Ruey Dar Chang, Chao Sung Lai

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