Suppression of Boron transient enhanced diffusion in Silicon by Carbon implant

張榮峰

Research output: Types of ThesisMaster's thesis

Translated title of the contribution以碳離子植入於矽中來抑制硼離子暫態加速擴散
Original languageAmerican English
Supervisors/Advisors
  • Lin, Jeng-Ping, Supervisor
StatePublished - 2005
Externally publishedYes

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