Surface acoustic waves in finite-depth air/silicon phononic crystals

Jia Hong Sun*, Jyun Hua Jhou, Yuan Hai Yu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Phononic crystals (PnCs) can stop surface acoustic waves (SAW) at the band gap frequency range efficiently. Traditional two-dimensional PnCs for SAW have inclusions extending infinitely into the half-space. In fact, experimental specimens with finite-depth inclusions still showed the gaps. In this paper, the PnCs with finite-depth holes on the surface of silicon substrate were analyzed systematically. Dispersion curves were calculated and various SAW modes were identified. The boundary condition based on Bloch's theorem with real wave vectors can identify band structures and the one with complex wave vectors can analyze attenuation of SAWs in PnC. The evolution of acoustic bands, gap range, and attenuation was reported. Then PnC reflective gratings for SAW could be designed properly for high efficiency.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages2537-2540
Number of pages4
ISBN (Electronic)9781479970490
DOIs
StatePublished - 20 10 2014
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 03 09 201406 09 2014

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/TerritoryUnited States
CityChicago
Period03/09/1406/09/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

Keywords

  • phononic crystals
  • reflective grating
  • surface acoustic wave

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