Abstract
Phononic crystals (PnCs) can stop surface acoustic waves (SAW) at the band gap frequency range efficiently. Traditional two-dimensional PnCs for SAW have inclusions extending infinitely into the half-space. In fact, experimental specimens with finite-depth inclusions still showed the gaps. In this paper, the PnCs with finite-depth holes on the surface of silicon substrate were analyzed systematically. Dispersion curves were calculated and various SAW modes were identified. The boundary condition based on Bloch's theorem with real wave vectors can identify band structures and the one with complex wave vectors can analyze attenuation of SAWs in PnC. The evolution of acoustic bands, gap range, and attenuation was reported. Then PnC reflective gratings for SAW could be designed properly for high efficiency.
Original language | English |
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Title of host publication | IEEE International Ultrasonics Symposium, IUS |
Publisher | IEEE Computer Society |
Pages | 2537-2540 |
Number of pages | 4 |
ISBN (Electronic) | 9781479970490 |
DOIs | |
State | Published - 20 10 2014 |
Event | 2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States Duration: 03 09 2014 → 06 09 2014 |
Publication series
Name | IEEE International Ultrasonics Symposium, IUS |
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ISSN (Print) | 1948-5719 |
ISSN (Electronic) | 1948-5727 |
Conference
Conference | 2014 IEEE International Ultrasonics Symposium, IUS 2014 |
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Country/Territory | United States |
City | Chicago |
Period | 03/09/14 → 06/09/14 |
Bibliographical note
Publisher Copyright:© 2014 IEEE.
Keywords
- phononic crystals
- reflective grating
- surface acoustic wave