Abstract
A 2-D virtual wafer fabrication simulation suite has been employed for the technology CAD of SiGe channel heterojunction field effect transistors (HFETs). Complete fabrication process of SiGep-HFETs has been simulated. The SiGe material parameters and mobility model were incorporated to simulate Si/SiGe p-HFETs with a uniform germanium channel having an Leff of 0.5 μm. A significant improvement in linear transconductance is observed when compared to control-silicon p-MOSFETs.
| Original language | English |
|---|---|
| Pages (from-to) | 195-199 |
| Number of pages | 5 |
| Journal | Defence Science Journal |
| Volume | 51 |
| Issue number | 2 |
| DOIs | |
| State | Published - 04 2001 |
| Externally published | Yes |
Keywords
- CMOS circuits
- Computer-aided design
- Heterojunction field effect transistors
- Heterostructure devices
- MOSFETs
- SiGe p-HFETs
- Virtual wafer fabrication simulation
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