The application of fluorization and ALD for high-k sensing membrane based on EIS structures and LAPS

秦啟航

Research output: Types of ThesisMaster's thesis

Translated title of the contribution氟化與原子層沉積於電解液-絕緣層-半導體與光定址電位感測器感測薄膜之應用
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2010
Externally publishedYes

Cite this