| Translated title of the contribution | 氟化與原子層沉積於電解液-絕緣層-半導體與光定址電位感測器感測薄膜之應用 |
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| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2010 |
| Externally published | Yes |
The application of fluorization and ALD for high-k sensing membrane based on EIS structures and LAPS
秦啟航
Research output: Types of Thesis › Master's thesis