The CeO2 sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications

Che Chun Liu; Ming Ling Lee; Kow Ming Chang; Shan Wei Chang; Hsiang Chen; Chyuan Haur Kao; Wei Kung Sung; Min Hau Kuo; Che Wei Chang; Chia Lun Chang; Chun Fu Lin

doi:10.1109/ICSICT.2014.7021639

The CeO₂ sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications

Che Chun Liu, Ming Ling Lee, Kow Ming Chang, Shan Wei Chang, Hsiang Chen, Chyuan Haur Kao, Wei Kung Sung, Min Hau Kuo, Che Wei Chang, Chia Lun Chang, Chun Fu Lin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In the paper, the EIS structure with high-k CeO₂ sensing film has more responsive to H⁺ relative to Na⁺ and K⁺. The CeO₂ sensing membrane annealed with O₂ at 800°C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.

Original language	English
Title of host publication	Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
Editors	Jia Zhou, Ting-Ao Tang
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479932962
DOIs	https://doi.org/10.1109/ICSICT.2014.7021639
State	Published - 23 01 2014
Event	2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 - Guilin, China Duration: 28 10 2014 → 31 10 2014

Publication series

Name	Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014

Conference

Conference	2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
Country/Territory	China
City	Guilin
Period	28/10/14 → 31/10/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

Access to Document

10.1109/ICSICT.2014.7021639

Cite this

Liu, C. C., Lee, M. L., Chang, K. M., Chang, S. W., Chen, H., Kao, C. H., Sung, W. K., Kuo, M. H., Chang, C. W., Chang, C. L., & Lin, C. F. (2014). The CeO₂ sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications. In J. Zhou, & T.-A. Tang (Eds.), Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 Article 7021639 (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSICT.2014.7021639

Liu, Che Chun ; Lee, Ming Ling ; Chang, Kow Ming et al. / The CeO₂ sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications. Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. editor / Jia Zhou ; Ting-Ao Tang. Institute of Electrical and Electronics Engineers Inc., 2014. (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014).

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title = "The CeO2 sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications",

abstract = "In the paper, the EIS structure with high-k CeO2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO2 sensing membrane annealed with O2 at 800°C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.",

author = "Liu, {Che Chun} and Lee, {Ming Ling} and Chang, {Kow Ming} and Chang, {Shan Wei} and Hsiang Chen and Kao, {Chyuan Haur} and Sung, {Wei Kung} and Kuo, {Min Hau} and Chang, {Che Wei} and Chang, {Chia Lun} and Lin, {Chun Fu}",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 ; Conference date: 28-10-2014 Through 31-10-2014",

year = "2014",

month = jan,

day = "23",

doi = "10.1109/ICSICT.2014.7021639",

language = "英语",

series = "Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

editor = "Jia Zhou and Ting-Ao Tang",

booktitle = "Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014",

address = "美国",

}

Liu, CC, Lee, ML, Chang, KM, Chang, SW, Chen, H, Kao, CH, Sung, WK, Kuo, MH, Chang, CW, Chang, CL & Lin, CF 2014, The CeO₂ sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications. in J Zhou & T-A Tang (eds), Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014., 7021639, Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014, Institute of Electrical and Electronics Engineers Inc., 2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014, Guilin, China, 28/10/14. https://doi.org/10.1109/ICSICT.2014.7021639

The CeO₂ sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications. / Liu, Che Chun; Lee, Ming Ling; Chang, Kow Ming et al.
Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. ed. / Jia Zhou; Ting-Ao Tang. Institute of Electrical and Electronics Engineers Inc., 2014. 7021639 (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Chang, Shan Wei

AU - Chen, Hsiang

AU - Kao, Chyuan Haur

AU - Sung, Wei Kung

AU - Kuo, Min Hau

AU - Chang, Che Wei

AU - Chang, Chia Lun

AU - Lin, Chun Fu

PY - 2014/1/23

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N2 - In the paper, the EIS structure with high-k CeO2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO2 sensing membrane annealed with O2 at 800°C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.

AB - In the paper, the EIS structure with high-k CeO2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO2 sensing membrane annealed with O2 at 800°C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.

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PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 28 October 2014 through 31 October 2014

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Liu CC, Lee ML, Chang KM, Chang SW, Chen H, Kao CH et al. The CeO₂ sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications. In Zhou J, Tang TA, editors, Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. Institute of Electrical and Electronics Engineers Inc. 2014. 7021639. (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014). doi: 10.1109/ICSICT.2014.7021639