The Characterization of HfO2 Thin Film Treatment by N2O

  • 馬家騏

Research output: Types of Thesis › Master's thesis

Translated title of the contribution以N2O作退火之氧化鉿薄膜特性
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2001
Externally publishedYes

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