The comparison of the high-k Sm2O3 and Sm2 TiO5 dielectrics deposited on the polycrystalline silicon

Chyuan Haur Kao*, Hsiang Chen, Shih Po Lin

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

12 Scopus citations

Fingerprint

Dive into the research topics of 'The comparison of the high-k Sm2O3 and Sm2 TiO5 dielectrics deposited on the polycrystalline silicon'. Together they form a unique fingerprint.

Biochemistry, Genetics and Molecular Biology

Engineering

Material Science