Skip to main navigation Skip to search Skip to main content

The cross contamination problem in AlGaAs/InGaP/AlGaAs liquid phase epitaxy

  • L. B. Chang*
  • , K. Y. Cheng
  • , C. C. Liu
  • *Corresponding author for this work
  • University of Illinois at Urbana-Champaign
  • National Defense University Taiwan

Research output: Contribution to journalJournal Article peer-review

6 Scopus citations
Original languageEnglish
Pages (from-to)K213-K218
JournalCrystal Research and Technology
Volume24
Issue number12
DOIs
StatePublished - 12 1989
Externally publishedYes

Cite this