The Deactivation of Heavily Doped Arsenic and Phosphorus in Polycrystalline Silicon

蔡宗叡

Research output: Types of ThesisMaster's thesis

Translated title of the contribution重摻雜砷及磷在複晶矽膜上去活化現象
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2001
Externally publishedYes

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