| Translated title of the contribution | 重摻雜砷及磷在複晶矽膜上去活化現象 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2001 |
| Externally published | Yes |
The Deactivation of Heavily Doped Arsenic and Phosphorus in Polycrystalline Silicon
蔡宗叡
Research output: Types of Thesis › Master's thesis