The demonstration of recessed anodes AlGaN/GaN Schottky barrier diodes using microwave cyclic plasma oxidation/wet etching techniques

Kuang Po Hsueh, Hsien Chin Chiu*, Hsiang Chun Wang, Hsuan Ling Kao, Feng Tso Chien, Wen Yen Lin

*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

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