The Development of Molybdenum Metal Gate by Nitrogen-Controlled Sputtering

孫偉鈞

Research output: Types of ThesisMaster's thesis

Translated title of the contribution鉬金屬閘電極之濺鍍氮化製程開發
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Yang, Jun-Zhe, Supervisor
StatePublished - 2002
Externally publishedYes

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