| Translated title of the contribution | 鉬金屬閘電極之濺鍍氮化製程開發 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2002 |
| Externally published | Yes |
The Development of Molybdenum Metal Gate by Nitrogen-Controlled Sputtering
孫偉鈞
Research output: Types of Thesis › Master's thesis