The Effect of Ion Sensor Treated by Nitrogen Plasma Immersion Ion Implantation Technique

Research output: Contribution to conferenceProceeding

Original languageAmerican English
StatePublished - 2012
EventInternational Electron Devices and Materials Symposia 2012 (IEDMS 2012) - Kaohsiung, Taiwan
Duration: 29 11 201230 11 2012

Conference

ConferenceInternational Electron Devices and Materials Symposia 2012 (IEDMS 2012)
Period29/11/1230/11/12

Cite this