| Translated title of the contribution | 使用三氧化二鉺介電層於複晶矽的氟離子效應之研究 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2010 |
| Externally published | Yes |
The Fluorine Ion Effect of Er2O3(Erbium Oxide) Dielectrics Deposited on Polycrystalline Silicon
范軒琦
Research output: Types of Thesis › Master's thesis