The Impact of Implant Damages on Dopant Diffusion

何立瑋

Research output: Types of ThesisMaster's thesis

Translated title of the contribution離子佈植損傷對摻雜擴散之影響
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2000
Externally publishedYes

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