The investigation of Ti-doped high-k dielectrics deposited on polycrysalline silicon

潘煜琮

Research output: Types of ThesisMaster's thesis

Translated title of the contribution鈦摻雜高介電絕緣層在複晶矽上之研究
Original languageAmerican English
Supervisors/Advisors
  • Kao, Chyuan-Haur, Supervisor
StatePublished - 2010
Externally publishedYes

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