| Translated title of the contribution | 氮植入矽基板的影響及成長氧化層的機制 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2000 |
| Externally published | Yes |
The oxidation mechanism and the effect of nitrogen implanted silicon substrate
俞建安
Research output: Types of Thesis › Master's thesis