| Translated title of the contribution | 氮化鉿應用於金屬閘極的製程開發 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2005 |
| Externally published | Yes |
The Process Development of Hafnium Nitride on Metal Gate Electrode
彭興淦
Research output: Types of Thesis › Master's thesis