The Process Development of Hafnium Nitride on Metal Gate Electrode

  • 彭興淦

Research output: Types of Thesis › Master's thesis

Translated title of the contribution氮化鉿應用於金屬閘極的製程開發
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Wang, Jer-Chyi, Supervisor
StatePublished - 2005
Externally publishedYes

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