| Translated title of the contribution | 氮化及氟化高介電係數絕緣層之技術開發 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2008 |
| Externally published | Yes |
The Process Development of Nitrided and Fluorinated High-k Dielectrics
王茂盈
Research output: Types of Thesis › Master's thesis