| Translated title of the contribution | 氮化及氟化高介電係數絕緣層之技術開發 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 2008 |
| Externally published | Yes |
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The Process Development of Nitrided and Fluorinated High-k Dielectrics
- 王茂盈
Research output: Types of Thesis › Master's thesis