| Translated title of the contribution | 鉿鉬二元合金金屬閘極氮化製程開發 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2007 |
| Externally published | Yes |
The Process Development of Nitrogen Incorporation in Hf-Mo Binary Alloys Metal Gate Electrode
黃至偉
Research output: Types of Thesis › Master's thesis