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The Process Development of Nitrogen Incorporation in Hf-Mo Binary Alloys Metal Gate Electrode

  • 黃至偉

Research output: Types of Thesis › Master's thesis

Translated title of the contribution鉿鉬二元合金金屬閘極氮化製程開發
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2007
Externally publishedYes

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