| Translated title of the contribution | 氮化鉭應用於電阻與金屬閘極的製程開發 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2004 |
| Externally published | Yes |
The Process Development of Tantalum Nitride on Resistor and Metal Gate Electrode
謝昌興
Research output: Types of Thesis › Master's thesis