The Process Development of Tantalum Nitride on Resistor and Metal Gate Electrode

謝昌興

Research output: Types of ThesisMaster's thesis

Translated title of the contribution氮化鉭應用於電阻與金屬閘極的製程開發
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2004
Externally publishedYes

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