The reflectivity enhancement of Ni/Ag/(Ti or Mo)/Au ohmic contact for flip-chip light-emitting diode applications

Liann Be Chang*, Ching Chuan Shiue, Ming Jer Jeng

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

The proposed multilayer structures Ni/Ag/M/Au, with blocking metal (M) of Ti and Mo, to form both ohmic and reflective contact for flip chip light emitting diode (FCLED) application, are fabricated. During the annealing process of conventional three-layer Ni/Ag/Au contacts, serious Au intermixing with Ag and Ni was found to result in poor reflectance (63% at the wavelength of 465 nm). It is found that the inserted (between Ni/Ag and Au) diffusion barrier (Ti or Mo) can block Au inter diffusion effectively and hence improves the correspondent FCLED reflectivity (as high as 93%).

Original languageEnglish
Title of host publication15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007
Pages177-180
Number of pages4
DOIs
StatePublished - 2007
Event15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007 - Catania, Italy
Duration: 02 10 200705 10 2007

Publication series

Name15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007

Conference

Conference15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007
Country/TerritoryItaly
CityCatania
Period02/10/0705/10/07

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