The Study of Gd2O3 Nanocrystal Memory by Using Post CF4 Plasma Treatment and Rapid Thermal Anneal

許瑞麟

Research output: Types of ThesisMaster's thesis

Translated title of the contribution利用四氟化碳電漿處理結合快速熱退火於三氧化二釓奈米晶體記憶體之研究
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Wang, Jer-Chyi, Supervisor
StatePublished - 2010
Externally publishedYes

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