| Translated title of the contribution | 利用四氟化碳電漿處理結合快速熱退火於三氧化二釓奈米晶體記憶體之研究 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 2010 |
| Externally published | Yes |
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Research output: Types of Thesis › Master's thesis
| Translated title of the contribution | 利用四氟化碳電漿處理結合快速熱退火於三氧化二釓奈米晶體記憶體之研究 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 2010 |
| Externally published | Yes |