Translated title of the contribution | 射頻濺鍍鈦摻雜之三氧化二鉍、三氧化二釔高介電絕緣層在複晶矽上的研究 |
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Original language | American English |
Supervisors/Advisors |
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State | Published - 2010 |
Externally published | Yes |
The Study of Ti-doped Tb2O3 and Y2O3 High-K Dielectrics on Polycrystalline Silicon by RF Sputtering
鍾育騰
Research output: Types of Thesis › Master's thesis