The Study of Ti-doped Tb2O3 and Y2O3 High-K Dielectrics on Polycrystalline Silicon by RF Sputtering

鍾育騰

Research output: Types of ThesisMaster's thesis

Translated title of the contribution射頻濺鍍鈦摻雜之三氧化二鉍、三氧化二釔高介電絕緣層在複晶矽上的研究
Original languageAmerican English
Supervisors/Advisors
  • Kao, Chyuan-Haur, Supervisor
StatePublished - 2010
Externally publishedYes

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