@inproceedings{5d3452c8a208494aa0993122d966b1cc,
title = "The super nernst phenomena of hydrogen ion sensor with HfO 2/Si3N4/SiO2 multiple sensing membranes",
abstract = "This work a systematic investigates the behavior and mechanism of pH-sensing using an electrolyte-insulator-semiconductor (EIS) structure with multiple sputtered-HfO2/Si3N4/SiO2 sensing membranes. Capacitance-voltage (C-V) measurements were used to characterize the sensing properties. A pH-response over the Nernstian limit of the proposed device is achieved after programming. An increase of pHsensitivity with programming voltage and time is observed. Moreover, the pH-response is stable after 100 program/erase (P/E) cycles and the drift rate after programming is satisfactory. The high pH-sensitivity of this multiple sensing membrane EIS structure suggests the possibility of detecting small pH variations in bio-sensor applications.",
author = "Wang, {Jer Chyi} and Lu, {Tseng Fu} and Liu, {Chieh Yuan} and Yang, {Chia Ming} and Lai, {Chao Sung}",
year = "2011",
doi = "10.3850/978-981-08-7615-9-BS02",
language = "英语",
isbn = "9789810876159",
series = "ISOB 2011 - Proceedings of the 1st International Symposium ISOB 2011 - Proceedings of the 1st International Symposium on Bioengineering",
pages = "10--15",
booktitle = "ISOB 2011 - Proceedings of the 1st International Symposium on Bioengineering",
note = "1st International Symposium on Bioengineering, ISOB 2011 ; Conference date: 19-01-2011 Through 19-01-2011",
}