The suppression of boron diffusion of MOSFET by using carbon or/and Fluorine implantation

李世傑

Research output: Types of ThesisMaster's thesis

Translated title of the contribution利用碳或/與氟離子植入抑制之NMOSFET硼擴散效應
Original languageAmerican English
Supervisors/Advisors
  • Pan, Tung-Ming, Supervisor
StatePublished - 2007
Externally publishedYes

Cite this