The Ta2O5 (Tantalum Pentoxide) Dielectrics on Polysilicon with the Fluorine Ion

羅文仕

Research output: Types of ThesisMaster's thesis

Translated title of the contribution使用氟離子於五氧化二鉭之複晶矽絕緣層之研究
Original languageAmerican English
Supervisors/Advisors
  • Kao, Chyuan-Haur, Supervisor
StatePublished - 2010
Externally publishedYes

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