The Threshold Voltage Adjustment of Molybdenum Metal Stack Gate by Nitrogen-Controlled Sputtering

楊盛耀

Research output: Types of ThesisMaster's thesis

Translated title of the contribution利用氮化濺鍍調節鉬金屬堆疊閘極之臨界電位
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2003
Externally publishedYes

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