The Ti-doped Tb2O3 Dielectric with Fluorine Implantation on

鄭詩男

Research output: Types of ThesisMaster's thesis

Translated title of the contribution氟離子佈植應用於鈦摻雜三氧化二鋱複晶矽介電層之研究
Original languageAmerican English
Supervisors/Advisors
  • Kao, Chyuan-Haur, Supervisor
StatePublished - 2011
Externally publishedYes

Cite this