Thickness measurement using scanned attenuated total reflection technique

Jin Chyuan Chen, Ding Liang Chiao, Chien Chou

Research output: Contribution to journalJournal Article peer-review


An improved method for determining the thin film thickness in terms of the variation of reflectivity in Attenuated Total Reflection (ATR) is proposed. In which, the correlation of the difference of thin film thickness (Ad) and reflectivity (R) is derived on the basis of Fresnel's formula. in addition, a scanning unit is specially designed to scan the laser beam and detector synchronously. Experimental results indicate that the measurement accuracy is not affected by small fluctuation of the incident angle and the reflectivity change. Moreover, possible applications of this technique in developing the displacement sensor with high sensitivity are also suggested.

Original languageEnglish
Pages (from-to)129-134
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 05 08 1986
Externally publishedYes


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