Abstract
Detecting multiple ions and solutes in human body is important to medical examinations of patients. In this study, Ti-doped InGaO (IGO) electrolyte–insulator–semiconductor (EIS) biosensors were fabricated for multiple ion and solute sensing capability. To optimize the sensing performance, rapid thermal annealing could enhance up to 70% hydrogen ion sensitivity and more than 50% multiple ion and solute sensitivity compared with the as-deposited sample owing to improvement of material quality. Ti-doped IGO EIS multianalyte biosensors show promise for future portable biosensing applications.
Original language | English |
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Pages (from-to) | 20596-20604 |
Number of pages | 9 |
Journal | Journal of Materials Science: Materials in Electronics |
Volume | 30 |
Issue number | 23 |
DOIs | |
State | Published - 01 12 2019 |
Bibliographical note
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