Ti-doped indium gallium oxide electrolyte–insulator–semiconductor membranes for multiple ions and solutes detectors

Chyuan Haur Kao, Chia Shao Liu, Chun Yu Xu, Chun Fu Lin, Hsiang Chen*

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

6 Scopus citations

Abstract

Detecting multiple ions and solutes in human body is important to medical examinations of patients. In this study, Ti-doped InGaO (IGO) electrolyte–insulator–semiconductor (EIS) biosensors were fabricated for multiple ion and solute sensing capability. To optimize the sensing performance, rapid thermal annealing could enhance up to 70% hydrogen ion sensitivity and more than 50% multiple ion and solute sensitivity compared with the as-deposited sample owing to improvement of material quality. Ti-doped IGO EIS multianalyte biosensors show promise for future portable biosensing applications.

Original languageEnglish
Pages (from-to)20596-20604
Number of pages9
JournalJournal of Materials Science: Materials in Electronics
Volume30
Issue number23
DOIs
StatePublished - 01 12 2019

Bibliographical note

Publisher Copyright:
© 2019, Springer Science+Business Media, LLC, part of Springer Nature.

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