Transport measurements on MOVPE-grown InN films

Shang Chia Chen, Shih Kai Lin, Kun Ta Wu, Chao Ping Huang*, Pen Hsiu Chang, N. C. Chen, Chin An Chang, Hsian Chu Peng, Chuang Feng Shih, Kuo Shung Liu, Hong Syuan Wang, Pu Tai Yang, C. T. Liang, Y. H. Chang, Y. F. Chen

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

We have performed electrical transport measurements on InN films. Our results show that the electron transport in our InN films is metallic-like, that is, within the experimental error the carrier density is temperature- independent over a wide temperature range (4 K≤T≤290 K). At low temperatures, the resistivities of our InN devices appear to saturate and show gradual increase with increasing temperatures. We suggest that residue impurity scattering limits the electron mobility in InN films. We compare our results with existing theoretical models.

Original languageEnglish
Pages (from-to)428-430
Number of pages3
JournalMicroelectronics Journal
Volume36
Issue number3-6
DOIs
StatePublished - 03 2005

Keywords

  • InN films
  • Transport measurements

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