Urea Biosensor with Nitrited-ALD-HfO2 Membrane by Remote NH3 Plasma Based on EIS Structure

I-Shun Wang; Wen-Yu Chuang; Tseng-Fu Lu; Hao-Chun Chuang; Cheng-En Lue; Chia-Ming Yang; Dorota G. Pijanswska; Jer-Chyi Wang; Chao-Sung Lai

Urea Biosensor with Nitrited-ALD-HfO2 Membrane by Remote NH3 Plasma Based on EIS Structure

I-Shun Wang, Wen-Yu Chuang, Tseng-Fu Lu, Hao-Chun Chuang, Cheng-En Lue, Chia-Ming Yang, Dorota G. Pijanswska, Jer-Chyi Wang, Chao-Sung Lai

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2011
Event	2nd International Conference on Bio-Sensing Technology, 2011 - Amsterdam, Netherlands Duration: 10 10 2011 → 12 10 2011

Conference

Conference	2nd International Conference on Bio-Sensing Technology, 2011
Period	10/10/11 → 12/10/11

Cite this

@conference{c4b17830c48d41e6a934698f7eb2b703,

title = "Urea Biosensor with Nitrited-ALD-HfO2 Membrane by Remote NH3 Plasma Based on EIS Structure",

author = "I-Shun Wang and Wen-Yu Chuang and Tseng-Fu Lu and Hao-Chun Chuang and Cheng-En Lue and Chia-Ming Yang and Pijanswska, {Dorota G.} and Jer-Chyi Wang and Chao-Sung Lai",

year = "2011",

language = "American English",

note = "2nd International Conference on Bio-Sensing Technology, 2011 ; Conference date: 10-10-2011 Through 12-10-2011",

}

TY - CONF

T1 - Urea Biosensor with Nitrited-ALD-HfO2 Membrane by Remote NH3 Plasma Based on EIS Structure

AU - Wang, I-Shun

AU - Chuang, Wen-Yu

AU - Lu, Tseng-Fu

AU - Chuang, Hao-Chun

AU - Lue, Cheng-En

AU - Yang, Chia-Ming

AU - Pijanswska, Dorota G.

AU - Wang, Jer-Chyi

AU - Lai, Chao-Sung

PY - 2011

Y1 - 2011

M3 - Proceeding

T2 - 2nd International Conference on Bio-Sensing Technology, 2011

Y2 - 10 October 2011 through 12 October 2011

ER -