Using High Work Function Ni Metal to Improve the Stress Reliability of CaCu3Ti4O12 MIM capacitors

Li-Chun Chang, Cheng-Huan Yang, Hsuan-Ling Kao, an-Bean Wu

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2009
Event	36th International Conference On Metallurgical Coatings And Thin Films – ICMCTF 2009 - San Diego, California, USA Duration: 27 04 2009 → 01 05 2009

Conference	36th International Conference On Metallurgical Coatings And Thin Films – ICMCTF 2009
Period	27/04/09 → 01/05/09

Cite this

@conference{30f13fdb94294efe8a3cbc0d0fda4518,

title = "Using High Work Function Ni Metal to Improve the Stress Reliability of CaCu3Ti4O12 MIM capacitors",

author = "Li-Chun Chang and Cheng-Huan Yang and Hsuan-Ling Kao and an-Bean Wu",

year = "2009",

language = "American English",

note = "36th International Conference On Metallurgical Coatings And Thin Films – ICMCTF 2009 ; Conference date: 27-04-2009 Through 01-05-2009",

}