Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device

Tsung Tsong Wu; Wei Shan Wang; Jia Hong Sun; Jin Chen Hsu; Yung Yu Chen

doi:10.1063/1.3100775

Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device

Tsung Tsong Wu^*, Wei Shan Wang, Jia Hong Sun, Jin Chen Hsu, Yung Yu Chen

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

93 Scopus citations

Abstract

In this paper, a design that combines two-port surface acoustic wave (SAW) devices and phononic crystals (PCs) acting as reflected gratings is demonstrated. Finite-difference time-domain method is used to analyze SAWs encountering the PC and optimize the design. A layered ZnO/Si SAW device and a square lattice PC composing of cylindrical holes on silicon were fabricated. With the PC of 15-layer cylinders, experimental insertion loss shows a 7 dB improvement at 212 MHz at central frequency. In addition, the size of gratings is reduced significantly as compared to the traditional gratings with hundreds of metal strips.

Original language	English
Article number	101913
Journal	Applied Physics Letters
Volume	94
Issue number	10
DOIs	https://doi.org/10.1063/1.3100775
State	Published - 2009
Externally published	Yes

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title = "Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device",

abstract = "In this paper, a design that combines two-port surface acoustic wave (SAW) devices and phononic crystals (PCs) acting as reflected gratings is demonstrated. Finite-difference time-domain method is used to analyze SAWs encountering the PC and optimize the design. A layered ZnO/Si SAW device and a square lattice PC composing of cylindrical holes on silicon were fabricated. With the PC of 15-layer cylinders, experimental insertion loss shows a 7 dB improvement at 212 MHz at central frequency. In addition, the size of gratings is reduced significantly as compared to the traditional gratings with hundreds of metal strips.",

author = "Wu, {Tsung Tsong} and Wang, {Wei Shan} and Sun, {Jia Hong} and Hsu, {Jin Chen} and Chen, {Yung Yu}",

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AU - Wang, Wei Shan

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AU - Hsu, Jin Chen

AU - Chen, Yung Yu

PY - 2009

Y1 - 2009

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AB - In this paper, a design that combines two-port surface acoustic wave (SAW) devices and phononic crystals (PCs) acting as reflected gratings is demonstrated. Finite-difference time-domain method is used to analyze SAWs encountering the PC and optimize the design. A layered ZnO/Si SAW device and a square lattice PC composing of cylindrical holes on silicon were fabricated. With the PC of 15-layer cylinders, experimental insertion loss shows a 7 dB improvement at 212 MHz at central frequency. In addition, the size of gratings is reduced significantly as compared to the traditional gratings with hundreds of metal strips.

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JO - Applied Physics Letters

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Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device

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