Very low noise RF nMOSFETs on pastic by substrate thinning and wafer transfer

  • H. L. Kao*
  • , B. F. Hung
  • , Albert Chin
  • , J. M. Lai
  • , C. F. Lee
  • , S. P. McAlister
  • , C. C. Chi
  • *Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

3 Scopus citations

Abstract

A very low minimum noise figure (N Fmin) of 1.2 dB and a high associated gain of 12.8 dB at 10 GHz were measured for six-finger, 0.18-μm radio frequency (RF) metal-oxide semiconductor field-effect transistors mounted on insulating plastic following substrate-thinning (∼ 30 μm) and wafer transfer. Before this process, the devices had a slightly better RF performance of 1.1-dB N Fmin and a 13.7-dB associated gain. Thesmall RF performance degradation of the active transistors transferred to plastic shows the potential of integrating electronics onto plastic.

Original languageEnglish
Pages (from-to)757-759
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Volume15
Issue number11
DOIs
StatePublished - 11 2005
Externally publishedYes

Keywords

  • Associated gain
  • Metal-oxide semiconductor field-effect transistor (MOSFET)
  • Minimum noise figure
  • Plastic
  • Radio frequency (RF)

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