Very low voltage SiO2/HfON/HfAlO/TaN memory with fast speed and good retention
- C. H. Lai
- , Albert Chin
- , H. L. Kao
- , K. M. Chen
- , M. Hong
- , J. Kwo
- , C. C. Chi
- National Yang Ming Chiao Tung University
- Dept. of Material Science Eng.
- National Tsing Hua University
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
41
Scopus
citations